標題: HIGH-SENSITIVITY CMUT WITH INTERLAYER METAL ARCHITECTURE FOR MEDICAL ULTRASONIC SYSTEMS
作者: Cheng, Teng-Chuan
Liao, Yu-Te
Tsai, Tsung-Heng
電機學院
College of Electrical and Computer Engineering
關鍵字: CMUT;TIA;ultrasonic sensor;transducer
公開日期: 2015
摘要: This paper presents an integration of the capacitive micromachined ultrasonic transducers (CMUTs) and the transimpedance amplifier in medical ultrasound systems. The proposed CMUT and the sensing circuits are both fabricated on the same chip in a 0.18 mu m CMOS MEMS technology. Two interlayer metal structures are proposed to improve the sensitivity. The CMUTs are designed with 2MHz cells for medical diagnosis. The conversion efficiency of the CMUTs is 4 times and 1.8 times higher than that in the published structures.
URI: http://hdl.handle.net/11536/135764
ISBN: 978-1-4799-8955-3
期刊: 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)
起始頁: 1211
結束頁: 1214
Appears in Collections:Conferences Paper