標題: Development of Micro-hotplate with TaN Heater Based Cu-doped SnO2 Gas Sensor for Low Concentration of H2S Gas
作者: Chiou, Jin-Chern
Tsai, Shang-Wei
Lin, Chia-Yang
Chiou, Jin-Chern
電機學院
College of Electrical and Computer Engineering
公開日期: 2013
摘要: In this study, the MEMS-based SnO2 gas sensor with a TaN heater, MSGST, was designed and fabricated using micromachining technology. The heating performance of the TaN heater was measured using an IR thermometer. The response of the MSGST sensor to H2S gas was analyzed by obtaining the relationship between the resistance of the sensor and the gas concentration to determine the best design parameters. Experimental results indicate that a MEMS-based SnO2 gas sensor, integrating TaN with a micro-hotplate, was successfully implemented using micromachining technology. The TaN heater can operate at over 300 degrees C and produce a uniform thermal distribution on the micro-hotplate. The sensitivity of the MSGST sensor to the H2S gas is significantly improved using a Cu catalyst and the optimal design parameters (Sensing film = 100 mu m(2), Cu catalyst = 7.5 mM) are obtained by measuring the gas concentration characterization for each the designed sensor.
URI: http://hdl.handle.net/11536/135848
ISBN: 978-1-4673-4642-9
ISSN: 1930-0395
期刊: 2013 IEEE SENSORS
起始頁: 113
結束頁: 116
顯示於類別:會議論文