標題: Design, optimization and fabrication of two-dimension high contrast subwavelength grating (HCG) mirror on Silicon-on-insulator
作者: Huang, Shen-Che
Huang, Qiangsheng
Ma, Keqi
Zhang, Jianhao
Shi, Yaocheng
Dai, Daoxin
Lu, Tien-Chang
He, Sailing
光電工程學系
Department of Photonics
關鍵字: gratings;subwavelength structure;nanostructure fabrication;silicon-on-insulator
公開日期: 2015
摘要: The high contrast grating (HCG) mirror has been illustrated and characterized. The investigated parameters including grating periods and filling factors were calculated by finite-difference time-domain method. The two-dimension HCG was fabricated by electron-beam lithography and inductively coupled plasma process. The reflectivity of the fabricated HCG mirror was measured, resulting in around 200 nm bandwidth. The measured result also showed a good agreement with calculated one. This achievement was promising in developing the novel light emitters in the telecommunication region.
URI: http://hdl.handle.net/11536/136064
ISBN: 978-1-4799-4208-4
ISSN: 2378-8593
期刊: 2015 International Symposium on Next-Generation Electronics (ISNE)
Appears in Collections:Conferences Paper