標題: Rapid displacement sensor based on fitting scan
作者: Ye, Zheng-Jie
Hwang, Chi-Hung
Cheng, Pi-Ying
Chen, Chih-Yen
Weng, Chun-Jen
機械工程學系
材料科學與工程學系
Department of Mechanical Engineering
Department of Materials Science and Engineering
關鍵字: confocal;fast scanning;curve fitting
公開日期: 2016
摘要: A rapid displacement sensor with a varifocal lens based on a method of fitting scan is proposed for 3D surface profiling. The focal length of the varifocal lens can be adjusted by varying the driving current. By detecting the reflective power of the reflected laser, the displacement can be obtained. By integrating a LabVIEW program based on a Levenberg-Marquardt algorithm in this system, the measuring speed can be substantially improved. Finally, the 3D surface profile of a step-height sample was successfully scanned by this displacement sensor.
URI: http://hdl.handle.net/11536/136192
ISBN: 978-1-4673-9220-4
期刊: 2016 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGS
起始頁: 901
結束頁: 906
Appears in Collections:Conferences Paper