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dc.contributor.authorWeber, C.en_US
dc.contributor.authorChen, Y. C.en_US
dc.contributor.authorCheng, Y. T.en_US
dc.date.accessioned2019-04-03T06:47:20Z-
dc.date.available2019-04-03T06:47:20Z-
dc.date.issued2014-01-01en_US
dc.identifier.issn1877-7058en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.proeng.2014.11.734en_US
dc.identifier.urihttp://hdl.handle.net/11536/136417-
dc.description.abstractElectromagnetic driven MEMS speakers using Polydimethylsiloxane (PDMS) membrane have been investigated to obtain a better sound pressure level (SPL) respond in low frequency regime. The comparison between measure and COMSOL simulation of fabricated microspeakers shows that the copper coil and its electrical feedthrough have a strong effect on the rigidity of the membrane thus on the SPL. Without considering the feedthrough effect, wide bandwidth starting at low frequency can be obtained while the coil is placed in the centre of the membrane, whereas placing the coil close to the membrane border instead will give a better response in low frequency with feedthrough effect (C) 2014 Published by Elsevier Ltd.en_US
dc.language.isoen_USen_US
dc.subjecthearing aidsen_US
dc.subjectmicrospeakeren_US
dc.subjectcoil placementen_US
dc.subjectMEMSen_US
dc.subjectaudioen_US
dc.titleThe Study of the Inductive Coil to the Acoustic Performance of Electromagnetic Driven Microspeakeren_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1016/j.proeng.2014.11.734en_US
dc.identifier.journal28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014)en_US
dc.citation.volume87en_US
dc.citation.spage384en_US
dc.citation.epage387en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000369531700094en_US
dc.citation.woscount0en_US
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