| Title: | Some Dielectric and Conduction Properties of the r.f. Reactively Sputtered Al2O3 Thin Film |
| Authors: | 陳茂傑 M.C.Chen |
| Issue Date: | Jan-1972 |
| Publisher: | 交大學刊編輯委員會 |
| Abstract: | Dielectric films of Al2O3 were prepared by r.f. reactive sputtering. Investigation was then made on their dielectric dispersion and leakage characteristics. |
| URI: | http://hdl.handle.net/11536/137478 |
| Journal: | 交大學刊 SCIENCE BULLETIN NATIONAL CHIAO-TUNG UNIVERSITY |
| Volume: | 5 |
| Issue: | 2 |
| Begin Page: | 69 |
| End Page: | 74 |
| Appears in Collections: | Science Bulletin National Chiao-Tung University |
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