Some Dielectric and Conduction Properties of the r.f. Reactively Sputtered Al2O3 Thin Film

標題:	Some Dielectric and Conduction Properties of the r.f. Reactively Sputtered Al2O3 Thin Film
作者:	陳茂傑 M.C.Chen
公開日期:	Jan-1972
出版社:	交大學刊編輯委員會
摘要:	Dielectric films of Al2O3 were prepared by r.f. reactive sputtering. Investigation was then made on their dielectric dispersion and leakage characteristics.
URI:	http://hdl.handle.net/11536/137478
期刊:	交大學刊 SCIENCE BULLETIN NATIONAL CHIAO-TUNG UNIVERSITY
Volume:	5
Issue:	2
起始頁:	69
結束頁:	74
Appears in Collections:	Science Bulletin National Chiao-Tung University

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