氮化m面藍寶石基板與鑽石沉積於m面AlN氮化層之研究

Full metadata record

DC Field	Value	Language
dc.contributor.author	馬志成	zh_TW
dc.contributor.author	張立	zh_TW
dc.contributor.author	Ma, Zhih-Cheng	en_US
dc.contributor.author	Li, Chang	en_US
dc.date.accessioned	2018-01-24T07:37:06Z	-
dc.date.available	2018-01-24T07:37:06Z	-
dc.date.issued	2016	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070351513	en_US
dc.identifier.uri	http://hdl.handle.net/11536/138971	-
dc.language.iso	zh_TW	en_US
dc.subject	氮化	zh_TW
dc.subject	鑽石	zh_TW
dc.subject	氮化鋁	zh_TW
dc.subject	藍寶石基板	zh_TW
dc.subject	微波電漿	zh_TW
dc.subject	Nitridation	en_US
dc.subject	Diamond	en_US
dc.subject	AlN	en_US
dc.subject	Sapphire	en_US
dc.subject	Microwave plasma	en_US
dc.title	氮化m面藍寶石基板與鑽石沉積於m面AlN氮化層之研究	zh_TW
dc.title	The study of nitridation of m-plane sapphire substrate and diamond deposition on nitrided layer of m-plane AlN	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系所	zh_TW
Appears in Collections:	Thesis