氮化m面藍寶石基板與鑽石沉積於m面AlN氮化層之研究

Title:	氮化m面藍寶石基板與鑽石沉積於m面AlN氮化層之研究 The study of nitridation of m-plane sapphire substrate and diamond deposition on nitrided layer of m-plane AlN
Authors:	馬志成張立 Ma, Zhih-Cheng Li, Chang 材料科學與工程學系所
Keywords:	氮化;鑽石;氮化鋁;藍寶石基板;微波電漿;Nitridation;Diamond;AlN;Sapphire;Microwave plasma
Issue Date:	2016
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070351513 http://hdl.handle.net/11536/138971
Appears in Collections:	Thesis