電漿輔助化學氣相沈積碳化氮及碳氮化矽薄膜之結構與光學性質

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	張瑞閔	zh_TW
dc.contributor.author	呂志鵬	zh_TW
dc.contributor.author	Chang, Jui-Min	en_US
dc.contributor.author	Leu, Jih-perng	en_US
dc.date.accessioned	2018-01-24T07:38:31Z	-
dc.date.available	2018-01-24T07:38:31Z	-
dc.date.issued	2016	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070351519	en_US
dc.identifier.uri	http://hdl.handle.net/11536/139880	-
dc.language.iso	en_US	en_US
dc.subject	發光二極體	zh_TW
dc.subject	藍光傷害	zh_TW
dc.subject	電漿輔助化學氣相沈積	zh_TW
dc.subject	碳氮化矽	zh_TW
dc.subject	碳化氮	zh_TW
dc.subject	光學穿透度	zh_TW
dc.subject	LED	en_US
dc.subject	Blue light hazards	en_US
dc.subject	PECVD	en_US
dc.subject	carbon nitride	en_US
dc.subject	silicon carbonitride	en_US
dc.subject	optical transmittance	en_US
dc.title	電漿輔助化學氣相沈積碳化氮及碳氮化矽薄膜之結構與光學性質	zh_TW
dc.title	Structure and optical properties of carbon nitride and silicon carbonitride films prepared by PECVD	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系所	zh_TW
顯示於類別：	畢業論文