具厚度梯度導膜共振濾波器之微型光譜儀開發

Abstract

本研究最大宗旨在於將光譜儀微型化，設計出在縮小光譜儀體積的情況之下，卻不會失去光譜儀原本量測的準確性，並且達到即時性、高靈敏度的檢測效益。 本研究利用導膜共振（guided-mode resonance, GMR）的濾光特性，將濾波器的波導層厚度設計成梯度變化的趨勢，藉由濾波器波導層厚度的改變，此濾波元件在不同的位置下具有其對應的共振波長，使得單一一個濾波器可以支持多個不同的共振模態。 厚度梯度的導膜共振濾波器（gradient waveguide thickness guided-mode resonance filter, GWT-GMRF）具有多個不同的共振模態，取代了繞射式光譜儀中的分光元件，之後再與線性感光耦合元件結合就可定義出像素與共振波長之間的關係，最後再利用數值運算便可將光譜還原，使光譜儀體積達到體積微小化的結果。

The purpose of this thesis is to miniaturize the spectrometer. Design the miniature size of the spectrometer under this circumstance but without losing the original accuracy, and achieve real-time, high sensitivity detection. This thesis uses the characteristic of the guided-mode resonance (GMR), and design the thickness of the waveguide layer of the filter by changing the gradient of guided-mode resonance (GMR), through changing the thickness of the filter waveguide layer has corresponded to the different resonance wavelength. So that a single filter can support a lot of different resonance modes. The GWT-GMRF has many different resonant modes. Replace the spectroscopic elements in diffractive spectrometers, and then combine the linear photosensitive coupling element (GWT-GMRF) with the pixel can be defined the relationship between the resonant and wavelength. Finally, using the numerical calculation can restore the spectrum, so that the volume of the spectrometer will achieve the purpose of miniaturization.