矽基液晶空間光調制雷射光束整形應用於積層製造系統之研究

Abstract

本實驗提出一個創新的方法來提高立體光固化Stereolithography Apparatus的加工速度與提升精度的方法，其關鍵技術在於利用兩台相位型矽基液晶(Liquid Crystal on Silicon, LCoS)做為空間光調制器使高斯光束整形為平頂光束Top-Hat，將兩道整形光束透過疊加達到微米尺度的雷射加工技術，利用電腦全像術Computer-generated holography達到動態式的投影技術，猶如動態光罩，透過事先撰寫的全像片控制全像繞射的圖形位置，藉此省去傳統式積層製造的機械式移動設備，並且同時能夠達到多條不同粗細的線形雷射，提高雷射曝光的生產速度，透過振幅的疊加，振幅強度快速的變化使得加工區域定義更加明顯。

This thesis presents an innovative fabrication process to improve efficiency and precision for Stereolithography Apparatus. The main technique of this method is taking two Liquid Crystal on Silicon as Spatial Light Modulator, that two LCoS are independent. We change the Gaussian beam energy distribution to Top-Hat distribution. The two plastic beam through the superposition to achieve micron-scale laser processing technology. Through the phase type Hologram calculation in advance to control the target position in the diffraction plane, we can use Computer-generated holography to attain dynamic projection, which like a dynamic mask. Taking this method to reduce mechanical translation equipment of additive manufacturing. At the same time we can get several different thickness lines laser to enhance the production speed of laser processing.