Title: | 智慧製造-半導體製造之預診斷與健康管理 Intelligent Manufacturing - Prognostics and Health Management In Semiconductor Manufacturing |
Authors: | 李昭頂 李永銘 Li, Chao-Ting Li, Yung-Ming 管理學院資訊管理學程 |
Keywords: | 智慧製造;預診斷管理系統;資料探勘;分散式系統;大數據;Intelligent Manufacturing;PHM;Data Ming;Apache spark distributed system;Big Data |
Issue Date: | 2017 |
URI: | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070463427 http://hdl.handle.net/11536/141937 |
Appears in Collections: | Thesis |