Title: 智慧製造-半導體製造之預診斷與健康管理
Intelligent Manufacturing - Prognostics and Health Management In Semiconductor Manufacturing
Authors: 李昭頂
李永銘
Li, Chao-Ting
Li, Yung-Ming
管理學院資訊管理學程
Keywords: 智慧製造;預診斷管理系統;資料探勘;分散式系統;大數據;Intelligent Manufacturing;PHM;Data Ming;Apache spark distributed system;Big Data
Issue Date: 2017
URI: http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070463427
http://hdl.handle.net/11536/141937
Appears in Collections:Thesis