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| Impacts of plasma-induced damage due to UV light irradiation during etching on Ge fin fabrication and device performance of Ge fin field-effect transistors | 11 |
本月總瀏覽
| 九月 2025 | 十月 2025 | 十一月 2025 | 十二月 2025 | 一月 2026 | 二月 2026 | 三月 2026 | |
|---|---|---|---|---|---|---|---|
| Impacts of plasma-induced damage due to UV light irradiation during etching on Ge fin fabrication and device performance of Ge fin field-effect transistors | 0 | 1 | 1 | 2 | 1 | 6 | 0 |
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