標題: Dimension dependent immunity of X-ray irradiation on low-temperature polycrystalline-silicon TFTs
作者: Wei, Yin-Chang
Li, Yi-Chieh
Lee, I-Che
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-六月-2017
摘要: Typically, each element in a large-area flat-panel X-ray image sensor consists of a photodetector and amorphous silicon (a-Si) thin-film transistor (TFT) switches. In order to reduce noise, increase sensor dynamic range, and increase carrying capacity, the low-temperature polycrystalline-silicon (LTPS) TFTs have been proposed as a candidate to replace the a-Si TFTs. However, there are concerns regarding the impact of X-ray radiation in LTPS-TFTs, and several studies have been conducted to inquire into the same. In this paper, we show that LTPS TFTs with small channel length (<2 mu m) are almost immune to X-ray radiation. (C) 2017 The Japan Society of Applied Physics
URI: http://dx.doi.org/10.7567/JJAP.56.06GF07
http://hdl.handle.net/11536/145481
ISSN: 0021-4922
DOI: 10.7567/JJAP.56.06GF07
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 56
Issue: 1
顯示於類別:期刊論文