Title: Reliability improvement in GaN HEMT power device using a field plate approach
Authors: Wu, Wen-Hao
Lin, Yueh-Chin
Chin, Ping-Chieh
Hsu, Chia-Chieh
Lee, Jin-Hwa
Liu, Shih-Chien
Maa, Jer-Shen
Iwai, Hiroshi
Chang, Edward Yi
Hsu, Heng-Tung
材料科學與工程學系
光電系統研究所
國際半導體學院
Department of Materials Science and Engineering
Institute of Photonic System
International College of Semiconductor Technology
Keywords: GaN HEMT;Field plate;High-voltage stress;Reliability
Issue Date: 1-Jul-2017
Abstract: This study investigates the effect of implementing a field plate on a GaN high-electron-mobility transistor (HEMT) to improve power device reliability. The results indicate that the field plate structure reduces the peak electrical field and interface traps in the device, resulting in higher breakdown voltage, lower leakage current, smaller current collapse, and better threshold voltage control. Furthermore, after high voltage stress, steady dynamic on-resistance and gate capacitance degradation improvement were observed for the device with the field plate. This demonstrates that GaN device reliability can be improved by using the field plate approach. (C) 2017 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.sse.2017.05.001
http://hdl.handle.net/11536/145619
ISSN: 0038-1101
DOI: 10.1016/j.sse.2017.05.001
Journal: SOLID-STATE ELECTRONICS
Volume: 133
Begin Page: 64
End Page: 69
Appears in Collections:Articles