標題: The origin and mitigation of volcano-like morphologies in micron-thick AlGaN/AlN heteroepitaxy
作者: Huang, Chia-Yen
Chang, Kai-Shiang
Huang, Cheng-Yao
Lin, Yun-Hsiang
Peng, Wei-Chih
Yen, Hung-Wei
Lin, Ray-Ming
Kuo, Hao-Chung
光電工程學系
Department of Photonics
公開日期: 14-八月-2017
摘要: We investigated the origin of morphological instability in 2 mu m thick Al0.6Ga0.4N/AlN heteroepitaxy. The primary morphology was driven by the residual epitaxial strain, forming hill-like morphologies via surface diffusion. The secondary morphology was driven by the interaction between the primary morphology and dislocation clusters in the epitaxial layers. The difference in the local growth rate yields volcano-like morphologies centering on deep pits. Insertion of multi-stack superlattice transition layers between AlGaN and GaN effectively suppressed the secondary morphologies by simultaneously pre-relaxing the template and filtering treading dislocations. Published by AIP Publishing.
URI: http://dx.doi.org/10.1063/1.4999767
http://hdl.handle.net/11536/145938
ISSN: 0003-6951
DOI: 10.1063/1.4999767
期刊: APPLIED PHYSICS LETTERS
Volume: 111
顯示於類別:期刊論文