標題: | Developing a Phase and Intensity Measurement Technique with Multiple Incident Angles under Surface Plasmon Resonance Condition |
作者: | Han, Chien-Yuan You, Du Cheng Chen, Yi-Ren Chao, Yu-Faye 光電工程學系 Department of Photonics |
關鍵字: | focused beam;ellipsometry;surface plasmon resonance |
公開日期: | 1-一月-2013 |
摘要: | This work presents the application of a focused beam polarizer-sample-analyzer imaging ellipsometer in measuring the ellipsometric parameters under the surface plasmon resonance condition. By using a cylindrical lens to produce fan shaped beam with multiple incident angles, three-intensity measurement technique can measure the ellipsometric parameters against each incidence but without the need of calibrating the azimuth errors of polarizer and analyzer. As a result of multiple incident angles approach, the whole SPR curve can be obtained without rotating the sensor chip. The intensity and phase response in the air and water interface of the sensor chip were demonstrated, and almost all measured results are close to the theoretical model. |
URI: | http://dx.doi.org/10.1117/12.2035029 http://hdl.handle.net/11536/146357 |
ISBN: | 978-0-8194-9774-1 |
ISSN: | 0277-786X |
DOI: | 10.1117/12.2035029 |
期刊: | INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2013: LASER SENSING AND IMAGING AND APPLICATIONS |
Volume: | 8905 |
起始頁: | 0 |
結束頁: | 0 |
顯示於類別: | 會議論文 |