High numerical-aperture microlens fabricated by focused ion beam milling

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DC Field	Value	Language
dc.contributor.author	Chiu, Yi	en_US
dc.contributor.author	Huang, Chien-Hsun	en_US
dc.contributor.author	Hsu, Ying-Chien	en_US
dc.date.accessioned	2019-04-03T06:47:04Z	-
dc.date.available	2019-04-03T06:47:04Z	-
dc.date.issued	2007-01-01	en_US
dc.identifier.isbn	978-0-8194-6762-1	en_US
dc.identifier.issn	0277-786X	en_US
dc.identifier.uri	http://dx.doi.org/10.1117/12.738639	en_US
dc.identifier.uri	http://hdl.handle.net/11536/146533	-
dc.description.abstract	The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m.	en_US
dc.language.iso	en_US	en_US
dc.subject	numerical aperture	en_US
dc.subject	microlens	en_US
dc.subject	focused ion beam	en_US
dc.subject	silicon nitride	en_US
dc.title	High numerical-aperture microlens fabricated by focused ion beam milling	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.doi	10.1117/12.738639	en_US
dc.identifier.journal	OPTICAL DATA STORAGE 2007	en_US
dc.citation.volume	6620	en_US
dc.citation.spage	0	en_US
dc.citation.epage	0	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:000250199900012	en_US
dc.citation.woscount	1	en_US
Appears in Collections:	Conferences Paper

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