完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chiu, Yi | en_US |
dc.contributor.author | Huang, Chien-Hsun | en_US |
dc.contributor.author | Hsu, Ying-Chien | en_US |
dc.date.accessioned | 2019-04-03T06:47:04Z | - |
dc.date.available | 2019-04-03T06:47:04Z | - |
dc.date.issued | 2007-01-01 | en_US |
dc.identifier.isbn | 978-0-8194-6762-1 | en_US |
dc.identifier.issn | 0277-786X | en_US |
dc.identifier.uri | http://dx.doi.org/10.1117/12.738639 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/146533 | - |
dc.description.abstract | The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 mu m. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | numerical aperture | en_US |
dc.subject | microlens | en_US |
dc.subject | focused ion beam | en_US |
dc.subject | silicon nitride | en_US |
dc.title | High numerical-aperture microlens fabricated by focused ion beam milling | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.doi | 10.1117/12.738639 | en_US |
dc.identifier.journal | OPTICAL DATA STORAGE 2007 | en_US |
dc.citation.volume | 6620 | en_US |
dc.citation.spage | 0 | en_US |
dc.citation.epage | 0 | en_US |
dc.contributor.department | 電控工程研究所 | zh_TW |
dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
dc.identifier.wosnumber | WOS:000250199900012 | en_US |
dc.citation.woscount | 1 | en_US |
顯示於類別: | 會議論文 |