標題: THREE-AXIS CMOS MEMS INDUCTIVE ACCELEROMETER WITH NOVEL Z-AXIS SENSING SCHEME
作者: Chiu, Yi
Hong, Hao-Chiao
Chang, Chi-Ming
電機工程學系
Department of Electrical and Computer Engineering
關鍵字: CMOS MEMS;accelerometer;three-axis;inductive sensing;LC-tank oscillator
公開日期: 1-一月-2017
摘要: This paper reports a three-axis CMOS MEMS inductive accelerometer fabricated by a 0.18. m CMOS process. The folded suspension beams around the single shuttle mass function as springs and inductor windings simultaneously. The winding inductance is changed upon deformation due to the shuttle mass displacement. The inductance variation is sensed by differential LC-tank oscillators. A novel z-axis inductive sensing scheme is proposed. Experiments showed sensitivities of 12.9, 21.6, and 1.2 kHz/g in the x, y, and z axes, respectively.
URI: http://hdl.handle.net/11536/147015
期刊: 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)
起始頁: 410
結束頁: 413
顯示於類別:會議論文