標題: | THREE-AXIS CMOS MEMS INDUCTIVE ACCELEROMETER WITH NOVEL Z-AXIS SENSING SCHEME |
作者: | Chiu, Yi Hong, Hao-Chiao Chang, Chi-Ming 電機工程學系 Department of Electrical and Computer Engineering |
關鍵字: | CMOS MEMS;accelerometer;three-axis;inductive sensing;LC-tank oscillator |
公開日期: | 1-一月-2017 |
摘要: | This paper reports a three-axis CMOS MEMS inductive accelerometer fabricated by a 0.18. m CMOS process. The folded suspension beams around the single shuttle mass function as springs and inductor windings simultaneously. The winding inductance is changed upon deformation due to the shuttle mass displacement. The inductance variation is sensed by differential LC-tank oscillators. A novel z-axis inductive sensing scheme is proposed. Experiments showed sensitivities of 12.9, 21.6, and 1.2 kHz/g in the x, y, and z axes, respectively. |
URI: | http://hdl.handle.net/11536/147015 |
期刊: | 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) |
起始頁: | 410 |
結束頁: | 413 |
顯示於類別: | 會議論文 |