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dc.contributor.authorYeh, Po-Chenen_US
dc.contributor.authorDuan, Haoen_US
dc.contributor.authorChung, Tien-Kanen_US
dc.date.accessioned2018-08-21T05:57:05Z-
dc.date.available2018-08-21T05:57:05Z-
dc.date.issued2017-01-01en_US
dc.identifier.urihttp://hdl.handle.net/11536/147017-
dc.description.abstractThis paper demonstrates a self-powered piezoelectric three-axis MEMS magnetic sensor. The sensor consists of a silicon diaphragm, a PZT thin film with Pt top and bottom electrodes, and two patterned Ni thick films. When three-axial magnetic fields are applied to the sensor, alternating magnetic forces/torques are induced in two Ni films and consequently corresponding deformation/bending are produced in the diaphragm structure. The deformation/bending of the diaphragm generate the strains in the PZT thin film and thus produce corresponding different piezoelectric voltage responses. The testing results show the sensor successfully senses three-axial magnetic fields and has a decent linearity in the range of 5-70 Gauss.en_US
dc.language.isoen_USen_US
dc.subjectPiezoelectricen_US
dc.subjectmagnetic sensoren_US
dc.subjectthree-axisen_US
dc.subjectMEMSen_US
dc.titleA NOVEL SELF-POWERED PIEZOELECTRIC THREE-AXIS MEMS MAGNETIC SENSORen_US
dc.typeProceedings Paperen_US
dc.identifier.journal2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)en_US
dc.citation.spage1021en_US
dc.citation.epage1024en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.department國際半導體學院zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.contributor.departmentInternational College of Semiconductor Technologyen_US
dc.identifier.wosnumberWOS:000426701400253en_US
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