Auto Defect Detection of A-IGZO Thin Film Transistor Backplane on Foldable Medical Array Panel Application

Abstract

This article reported on the pixel flaw detection properties of amorphous In-Ga-Zn-O-based active thin film transistors on flexible medical panel substrate application, which is using the non-invasive optoelectronic transforming inspection technique. The experimental data exactly showed good flaw detection rate > 90% and stable uniformity < 5%. Currently, it is a popular method with electrical testing and detection with advantages of ultrahigh resolution and small-pixel-sized medical panel, and no contact damaged to the application of flexible medical panel substrates.