標題: Photocapacitive Effect of Ferroelectric Hafnium-Zirconate Capacitor Structure
作者: Liou, Guan-Lin
Cheng, Chun-Hu
Chiu, Yu-Chien
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Ferroelectric;Hafnium-Zirconate;Photocapacitive Effect
公開日期: 1-一月-2017
摘要: In this work, we investigated the photocapacitive effect of the metal-ferroelectric-insulator-semiconductor capacitors under illumination. The photocapacitive effect is mainly caused by light photon excitation, contributed from the variation of depletion charge. We suggested that the ferroelectric domains are affected by defect dipole charges formed by the interface trapped charges to lead to the variation of depletion capacitance.
URI: http://hdl.handle.net/11536/147105
期刊: 2017 INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC)
顯示於類別:會議論文