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dc.contributor.authorYang, Shih-Weien_US
dc.contributor.authorLin, Shir-Kuanen_US
dc.date.accessioned2019-04-02T06:00:52Z-
dc.date.available2019-04-02T06:00:52Z-
dc.date.issued2014-07-01en_US
dc.identifier.issn0957-0233en_US
dc.identifier.urihttp://dx.doi.org/10.1088/0957-0233/25/7/075006en_US
dc.identifier.urihttp://hdl.handle.net/11536/147709-
dc.description.abstractIn this paper, an automatic optical inspection system is proposed for measuring the three-dimensional surface profile of multi-microlenses according to the optimal inspection path. The proposed system is applicable for full and sampling inspection of microlens arrays, and has the following contributions: (1) the optimal inspection path of sampling inspection is derived by a Genetic Algorithm considering the acceleration characteristic of the XY-table. (2) The incomplete microlens fringe is removed, and the center of each microlens can be automatically positioned. (3) The phase difference of each neighboring pixel is calculated through the concept of sign reversal in order to rebuild the surface profile. According to the experimental results, the lens sag of microlenses in different sizes can be correctly measured by the proposed system, and a relative error of 3.4% (max) can be achieved. Compared with other methods, the positioning time of the proposed method is shortened by 10% to 30%, validating the practicability of this system.en_US
dc.language.isoen_USen_US
dc.subjectautomatic optical inspection systemen_US
dc.subjectmulti-microlensesen_US
dc.subjectthree-dimensional surface profileen_US
dc.subjectoptimal inspection pathen_US
dc.titleAutomatic optical inspection system for 3D surface profile measurement of multi-microlenses using the optimal inspection pathen_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0957-0233/25/7/075006en_US
dc.identifier.journalMEASUREMENT SCIENCE AND TECHNOLOGYen_US
dc.citation.volume25en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000338634700007en_US
dc.citation.woscount2en_US
Appears in Collections:Articles