Application of 9 x 9 grid gas bags pressure control technology to imprinting of various microstructures

Abstract

This study proposed a pressure control technology of 9 x 9 grid gas bags for application to imprinting of various microstructures. First, the 9 x 9 grid imprinting system was designed and constructed. The novel system used laser light-emitting elements for correction through geometric method before the experiment. Moreover, the proposed system can set the imprint inclined plane in small inclination angle and accurate control pressure of 9 x 9 grid areas to achieve novel imprinting process of microstructures. The experimental results showed that 9 x 9 grid gas bag pressure control technology can accurately correct the plane of the imprinting system before experiment, accurately set the inclined plane required for the experiment, and accurately imprint microstructures. (C) 2016 Elsevier GmbH. All rights reserved.