標題: Application of 9 x 9 grid gas bags pressure control technology to imprinting of various microstructures
作者: Weng, Yung-Jin
Tsai, Jengjan
物理研究所
Institute of Physics
關鍵字: 9 x 9 Grid;Gas bags;Laser light-emitting elements;Imprinting correction
公開日期: 1-Jan-2016
摘要: This study proposed a pressure control technology of 9 x 9 grid gas bags for application to imprinting of various microstructures. First, the 9 x 9 grid imprinting system was designed and constructed. The novel system used laser light-emitting elements for correction through geometric method before the experiment. Moreover, the proposed system can set the imprint inclined plane in small inclination angle and accurate control pressure of 9 x 9 grid areas to achieve novel imprinting process of microstructures. The experimental results showed that 9 x 9 grid gas bag pressure control technology can accurately correct the plane of the imprinting system before experiment, accurately set the inclined plane required for the experiment, and accurately imprint microstructures. (C) 2016 Elsevier GmbH. All rights reserved.
URI: http://dx.doi.org/10.1016/j.ijleo.2016.06.036
http://hdl.handle.net/11536/147840
ISSN: 0030-4026
DOI: 10.1016/j.ijleo.2016.06.036
期刊: OPTIK
Volume: 127
起始頁: 8638
結束頁: 8645
Appears in Collections:Articles