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dc.contributor.authorYu, Shang-Yuen_US
dc.contributor.authorSchrodj, Gautieren_US
dc.contributor.authorMougin, Karineen_US
dc.contributor.authorDentzer, Josephen_US
dc.contributor.authorMalval, Jean-Pierreen_US
dc.contributor.authorZan, Hsiao-Wenen_US
dc.contributor.authorSoppera, Olivieren_US
dc.contributor.authorSpangenberg, Arnauden_US
dc.date.accessioned2019-04-02T05:58:28Z-
dc.date.available2019-04-02T05:58:28Z-
dc.date.issued2018-12-01en_US
dc.identifier.issn0935-9648en_US
dc.identifier.urihttp://dx.doi.org/10.1002/adma.201805093en_US
dc.identifier.urihttp://hdl.handle.net/11536/148621-
dc.description.abstractMetal oxides are an important class of materials for optoelectronic applications. In this context, developing simple and versatile processes for integrating these materials at the microscale and nanoscale has become increasingly important. One of the major remaining challenges is to control the microstructuration and electro-optical properties in a single step. It is shown here that near-infrared femtosecond laser irradiation can be successfully used to prepare amorphous or crystallized TiO2 microstructures in a single step using a direct laser writing (DLW) approach from a TiO2 precursor thin film doped with a suitable dye. When laser writing is conducted under a nitrogen atmosphere, simultaneous to the crosslinking of the Ti-oxide precursor, the graphitization of the organic species embedded in the initial film is observed. In this case, a carbon network is generated within the TiO2 matrix, which significantly increases the conductivity. Moreover, the TiO2/C nanocomposite exhibits piezoresistive behavior that is used in a pressure sensor device. Using this route, it is possible to use DLW to fabricate microsized pressure sensors.en_US
dc.language.isoen_USen_US
dc.subjectconductive micropatternsen_US
dc.subjectfemtosecond direct laser writingen_US
dc.subjectfunctional metal oxidesen_US
dc.subjectminiaturized pressure sensorsen_US
dc.subjectTiO2/carbon nanocompositesen_US
dc.titleDirect Laser Writing of Crystallized TiO2 and TiO2/Carbon Microstructures with Tunable Conductive Propertiesen_US
dc.typeArticleen_US
dc.identifier.doi10.1002/adma.201805093en_US
dc.identifier.journalADVANCED MATERIALSen_US
dc.citation.volume30en_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000453926000032en_US
dc.citation.woscount0en_US
Appears in Collections:Articles