標題: | Implementation of a CMOS/MEMS Accelerometer with ASIC Processes |
作者: | Liu, Yu-Sian Wen, Kuei-Ann 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | accelerometer design;spring design;analytical model |
公開日期: | 1-一月-2019 |
摘要: | This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 m application-specific integrated circuit (ASIC)-compatible CMOS/MEMS process. An approximate analytical model for the spring design is presented. The experiments showed that the resonant frequency of the proposed tri-axis accelerometer was around 5.35 kHz for out-plane vibration. The tri-axis accelerometer had an area of 1096 m x 1256 m. |
URI: | http://dx.doi.org/10.3390/mi10010050 http://hdl.handle.net/11536/148928 |
ISSN: | 2072-666X |
DOI: | 10.3390/mi10010050 |
期刊: | MICROMACHINES |
Volume: | 10 |
顯示於類別: | 期刊論文 |