標題: Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
作者: Liu, Yu-Sian
Wen, Kuei-Ann
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: accelerometer design;spring design;analytical model
公開日期: 1-Jan-2019
摘要: This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 m application-specific integrated circuit (ASIC)-compatible CMOS/MEMS process. An approximate analytical model for the spring design is presented. The experiments showed that the resonant frequency of the proposed tri-axis accelerometer was around 5.35 kHz for out-plane vibration. The tri-axis accelerometer had an area of 1096 m x 1256 m.
URI: http://dx.doi.org/10.3390/mi10010050
http://hdl.handle.net/11536/148928
ISSN: 2072-666X
DOI: 10.3390/mi10010050
期刊: MICROMACHINES
Volume: 10
Appears in Collections:Articles