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| Influences of deposition temperature on thermal stability and moisture resistance of chemical vapor deposited fluorinated silicon oxide by using indirect fluorinating precursor | 3 |
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| 八月 2025 | 九月 2025 | 十月 2025 | 十一月 2025 | 十二月 2025 | 一月 2026 | 二月 2026 | |
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| Influences of deposition temperature on thermal stability and moisture resistance of chemical vapor deposited fluorinated silicon oxide by using indirect fluorinating precursor | 0 | 0 | 0 | 0 | 0 | 1 | 1 |
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