標題: | Correlation of stress-induced leakage current with generated positive trapped charges for ultrathin gate oxide |
作者: | Lin, YH Lee, CL Lei, TF 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-二月-1998 |
摘要: | In this work, the evidence of the stress-induced leakage current related with the stress-generated positive trapped charges is presented and investigated. It is shown that the centroid of the positive trapped charges, which depends on the polarity of the stress current, affects the magnitude of the leakage current. And the trapping density of positive charges, which is determined by the final stress applied on the oxide, determines the final level of the leakage currents. |
URI: | http://hdl.handle.net/11536/149727 |
ISSN: | 0018-9383 |
期刊: | IEEE TRANSACTIONS ON ELECTRON DEVICES |
Volume: | 45 |
起始頁: | 567 |
結束頁: | 570 |
顯示於類別: | 期刊論文 |