Complementary Metal-Oxide-Semiconductor Micro-Electro-Mechanical-System Reconfigurable Cantilever Resonator with Multiple Electrostatic Electrodes

Abstract

In this paper we present a prestress vertical comb drive resonator with a frequency tuning capability The resonator consists of three sets of comb fingers which act-as driving electrodes The comb fingers are fabricated along with a composite beam One end of the composite beam is clamped to the anchor whereas the other end is elevated vertically by the residual stress A clamped force which is formed by a DC voltage is utilized to restrain the vibration of the composite beam By applying a DC clamped voltage and a driving voltage in different electrodes the resonator exhibits different frequency responses The device is fabricated through a 0 35 mu m complementary metal-oxide-semiconductor (CMOS) process with a post CMOS micromachining process Experimental results indicate that the initial resonant frequency of The device is 18 6 kHz and the maximum frequency tuning range up to 28 5% is obtained The resonator device can recover its original frequency without causing any structural damage (C) 2010 The Japan Society of Applied Physics