InGaN/GaN MQW Nanorods LED Fabricated by ICP-RIE and PEC Oxidation Processes

Title:	InGaN/GaN MQW Nanorods LED Fabricated by ICP-RIE and PEC Oxidation Processes
Authors:	Lai, Fang-, I Huang, H. W. Chiu, Ching-Hua Lai, C. F. Lu, T. C. Ku, H. C. Wang, S. C. 光電工程學系 Department of Photonics
Issue Date:	1-Jan-2007
Abstract:	The InGaN/GaN nanorods LED was successfully fabricated by ICP-RIE and PEC processes. Compared with as-grown sample, the PL and EL peak-wavelengths of the nanorods with PEC show 8.6 and 10.5 nm blue-shift, respectively. (c) 2007 Optical Society of America
URI:	http://hdl.handle.net/11536/151172
Journal:	2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5
Begin Page:	175
Appears in Collections:	Conferences Paper