Title: ONE-DIMENSIONAL TITANIUM NANOSTRUCTURE AND METHOD FOR FABRICATING THE SAME
Authors: Tze-Lung Chen
Hsin-Tien Chiu
Chi-Young Lee
Issue Date: 11-May-2017
Abstract: A one-dimensional titanium nanostructure and a method for fabricating the same are provided. A titanium metal reacts with titanium tetrachloride to form the one-dimensional titanium nanostructure on a heat-resistant substrate in a CVD method and under a reaction condition of a reaction temperature of 300-900° C., a deposition temperature of 200-850° C., a flow rate of the carrier gas of 0.1-50 sccm and a reaction time of 5-60 hours. The titanium nanostructure includes titanium nanowires, titanium nanobelts, flower-shaped titanium nanowires, titanium nanorods, titanium nanotubes, and titanium-titanium dioxide core-shell structures. The titanium nanostructure can be densely and uniformly grown on the heat-resistant substrate. The present invention neither uses a template nor uses the complicated photolithographic process, solution preparation process, and mixing-coating process. Therefore, the process scale-up, cost down, and the simplified production process are achieved.
Gov't Doc #: C30B029/02
C30B025/16
C30B029/60
C23C016/08
C23C016/46
URI: http://hdl.handle.net/11536/151273
Patent Country: USA
Patent Number: 20170130361
Appears in Collections:Patents


Files in This Item:

  1. 20170130361.pdf

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.