標題: | FABRICATION METHOD FOR TWO-DIMENSIONAL MATERIALS |
作者: | Tuo-Hung HOU Jyun-Hong Huang |
公開日期: | 11-十月-2018 |
摘要: | A fabrication method for two-dimensional materials of the present invention includes the following steps: forming a thin film having at least one two-dimensional element on a substrate; forming at least one capping layer on the thin film; annealing the thin film to form a two-dimensional material film after the capping layer is formed. |
官方說明文件#: | C23C016/50 C23C016/56 C23C016/52 C23C016/448 C23C014/34 C23C014/24 C23C014/06 C23C014/58 |
URI: | http://hdl.handle.net/11536/151441 |
專利國: | USA |
專利號碼: | 20180291508 |
顯示於類別: | 專利資料 |