A Direct-solution Fuzzy Collaborative Intelligence Approach for Yield Forecasting in Semiconductor Manufacturing

Abstract

Yield forecasting is a critical task to every semiconductor manufacturer. However, the existing methods for yield forecasting often deal with the logarithmic or log-sigmoid value, rather than the original value, of yield. To resolve this problem, in this study, the fuzzy collaborative intelligence (FCT) method proposed by Chen and Tin (2008) is modified, so that it can consider the original value of yield directly. The modified FCI method is called the direct-solution (DS)-FCI approach. The effectiveness oldie DS-FCI approach was validated with a real case. The experimental results showed that the DS-FCT approach outperformed Chen and Tin's FCI method in improving the forecasting accuracy and precision. (C) 2018 The Authors. Published by Elsevier B.V.