標題: A Direct-solution Fuzzy Collaborative Intelligence Approach for Yield Forecasting in Semiconductor Manufacturing
作者: Wang, Yi-Chi
Chen, Tin-Chih Toly
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: yield;forecasting;direct-solve;semiconductor
公開日期: 1-Jan-2018
摘要: Yield forecasting is a critical task to every semiconductor manufacturer. However, the existing methods for yield forecasting often deal with the logarithmic or log-sigmoid value, rather than the original value, of yield. To resolve this problem, in this study, the fuzzy collaborative intelligence (FCT) method proposed by Chen and Tin (2008) is modified, so that it can consider the original value of yield directly. The modified FCI method is called the direct-solution (DS)-FCI approach. The effectiveness oldie DS-FCI approach was validated with a real case. The experimental results showed that the DS-FCT approach outperformed Chen and Tin's FCI method in improving the forecasting accuracy and precision. (C) 2018 The Authors. Published by Elsevier B.V.
URI: http://dx.doi.org/10.1016/j.promfg.2018.10.021
http://hdl.handle.net/11536/152485
ISSN: 2351-9789
DOI: 10.1016/j.promfg.2018.10.021
期刊: 28TH INTERNATIONAL CONFERENCE ON FLEXIBLE AUTOMATION AND INTELLIGENT MANUFACTURING (FAIM2018): GLOBAL INTEGRATION OF INTELLIGENT MANUFACTURING AND SMART INDUSTRY FOR GOOD OF HUMANITY
Volume: 17
起始頁: 110
結束頁: 117
Appears in Collections:Conferences Paper