Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Xu, Wei | en_US |
dc.contributor.author | Ma, Shenhui | en_US |
dc.contributor.author | Wang, Xiaoyi | en_US |
dc.contributor.author | Chiu, Yi | en_US |
dc.contributor.author | Lee, Yi-Kuen | en_US |
dc.date.accessioned | 2019-12-13T01:09:53Z | - |
dc.date.available | 2019-12-13T01:09:53Z | - |
dc.date.issued | 2019-10-01 | en_US |
dc.identifier.issn | 1057-7157 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1109/JMEMS.2019.2928317 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/153004 | - |
dc.description.abstract | In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF ((TMCF)-M-2) sensor integrated with the interface circuit by using a commercial 0.35-mu m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the (TMCF)-M-2 sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22 degrees C similar to 48 degrees C. Therefore, this robust (TMCF)-M-2 sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | Micro calorimetric flow sensors | en_US |
dc.subject | CMOS MEMS | en_US |
dc.subject | ambient temperature compensation | en_US |
dc.subject | thermoresistive | en_US |
dc.subject | 1D model | en_US |
dc.subject | equivalent circuit model | en_US |
dc.title | A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1109/JMEMS.2019.2928317 | en_US |
dc.identifier.journal | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | en_US |
dc.citation.volume | 28 | en_US |
dc.citation.issue | 5 | en_US |
dc.citation.spage | 841 | en_US |
dc.citation.epage | 849 | en_US |
dc.contributor.department | 電機工程學系 | zh_TW |
dc.contributor.department | Department of Electrical and Computer Engineering | en_US |
dc.identifier.wosnumber | WOS:000489837100013 | en_US |
dc.citation.woscount | 0 | en_US |
Appears in Collections: | Articles |