標題: Study of Al interdiffusion in ultrathin beta-Ta/Co2FeAl/MgO heterostructures for enhanced spin-orbit torque
作者: Bhardwaj, Vishal
Chen, Kuan-Ming
Tseng, Yuan-Chieh
Chatterjee, Ratnamala
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Multilayer thin films;PMA;SOT-MRAM;XPS;Spin hall angle;Second harmonics technique
公開日期: 1-十二月-2019
摘要: In this work perpendicular magnetization of Co2FeAl (CFA) full-Heusler alloy films is achieved using rapid thermal annealing under N-2/H-2 gas flow in Si/beta-Ta(6.5 nm)/CFA(0.6-2 nm)/MgO(1.15 nm)/Pd(1 nm) heterostructures. The Al interdiffusion into MgO layer plays an important role in determining perpendicular magnetic anisotropy(PMA) and increasing the damping constant (alpha) of ultrathin CFA samples. The time of flight SIMS depth profiling along with XPS is used to study interdiffusion of Al across CFA/MgO interface. XPS analysis of Al-2p and Mg-1s spectra indicate the formation of A1(2)O(3) and MgAl2Ox oxide phases at CFA/MgO interface in addition to pure Al metal. The Slonczewski-like and the field-like SOT effective fields are quantified using second harmonics measurements. An effective spin hall angle of beta-Ta (6.5 nm) is estimated in range - 0.02 to - 0.06 for CFA layer thickness varied from 0.8 nm to 1.5 nm.
URI: http://dx.doi.org/10.1016/j.physb.2019.411662
http://hdl.handle.net/11536/153102
ISSN: 0921-4526
DOI: 10.1016/j.physb.2019.411662
期刊: PHYSICA B-CONDENSED MATTER
Volume: 574
起始頁: 0
結束頁: 0
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