Graphitic carbon film formation under Ni templates by radio-frequency sputtering for transparent electrode applications

Abstract

An alternate approach to the preparation of transfer-free graphitic carbon films is proposed in this paper. Using a standard radio-frequency sputtering system and a high-temperature annealing procedure, graphitic carbon films are prepared under Ni templates. The results demonstrate that carbon precipitation occurs at both Ni template interfaces. With repeated annealing procedures at 1100 degrees C, a sheet resistance of 1.36 x 10(4) Omega/square can be achieved. Selective carbon film deposition has also been developed via pattern formation on the Ni templates. The results indicate the potential application of this method to transparent electrode formation. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3646481]