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dc.contributor.authorXu, Weien_US
dc.contributor.authorWang, Xiaoyien_US
dc.contributor.authorChiu, Yien_US
dc.contributor.authorLee, Yi-Kuenen_US
dc.date.accessioned2020-05-05T00:02:26Z-
dc.date.available2020-05-05T00:02:26Z-
dc.date.issued2020-04-15en_US
dc.identifier.issn1530-437Xen_US
dc.identifier.urihttp://dx.doi.org/10.1109/JSEN.2019.2961948en_US
dc.identifier.urihttp://hdl.handle.net/11536/154238-
dc.description.abstractIn this paper, a thin film based Thermoresistive Micro Calorimetric Flow (TMCF) sensor by using a 0.35 mu m 2P4M CMOS MEMS technology is designed, fabricated and tested. The developed 1.6 mu m thick thin film CMOS TMCF sensor shows a maximum normalized sensitivity of 103 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0 similar to 19.4 m/s. The high sensitivity and wide dynamic range achieved by our CMOS MEMS flow sensor enable its deployment as a promising sensing node for HVAC application in the smart energy-efficient building (EeB). Moreover, a new one-dimensional (1D) analytical sensor model that considers the three-dimensional (3D) heat loss via the end of the thin film is proposed. The new 1D model can successfully capture the thin film based TMCF sensor's response, and its prediction results show a good agreement with the experimental study. Therefore, this new 1D model will be a useful design tool for the development of a high-performance TMCF sensor with a greatly reduced footprint.en_US
dc.language.isoen_USen_US
dc.subjectMicro calorimetric flow sensoren_US
dc.subjectCMOS MEMSen_US
dc.subjectthermoresistiveen_US
dc.subjectthin filmen_US
dc.subject1D analytical modelen_US
dc.titleHigh Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor With CMOS MEMS Technologyen_US
dc.typeArticleen_US
dc.identifier.doi10.1109/JSEN.2019.2961948en_US
dc.identifier.journalIEEE SENSORS JOURNALen_US
dc.citation.volume20en_US
dc.citation.issue8en_US
dc.citation.spage4104en_US
dc.citation.epage4111en_US
dc.contributor.department電機工程學系zh_TW
dc.contributor.departmentDepartment of Electrical and Computer Engineeringen_US
dc.identifier.wosnumberWOS:000522206500014en_US
dc.citation.woscount0en_US
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