Title: Giant Resistivity Change of Transparent ZnO/Muscovite Heteroepitaxy
Authors: Yen, Min
Lai, Yu-Hong
Zhang, Chun-Li
Cheng, Hou-Yung
Hsieh, Yi-Ting
Chen, Jhih-Wei
Chen, Yi-Chun
Chang, Li
Tsou, Nien-Ti
Li, Jiang-Yu
Chu, Ying-Hao
交大名義發表
材料科學與工程學系
National Chiao Tung University
Department of Materials Science and Engineering
Keywords: piezoresistive effect;piezopotential;flex sensor;ZnO;muscovite
Issue Date: 13-May-2020
Abstract: The piezoresistive effect has shown a remarkable potential for mechanical sensor applications and been sought for its excellent performance. A great attention was paid to the giant piezoresistive effect and sensitivity delivered by silicon-based nanostructures. However, low thermal stability and complicated fabrication process hinder their practical applications. To overcome these issues and enhance the functionalities, we envision the substantial piezopotential in a zinc oxide (ZnO)/muscovite (mica) heteroepitaxy system based on theoretical consideration and realize it in practice. High piezoresistive effect with giant change of resistivity (-80 to 240%) and large gauge factor (>1000) are demonstrated through mechanical bending. The detailed features of heteroepitaxy, electrical transport, and strain are probed to understand the mechanism of such a giant resistivity change. In addition, a bending model is established to reveal the distribution of strain. Finally, we demonstrate a flex sensor featuring high sensitivity, optical transparency, and two-segment sensing with a great potential toward practical applications. Such an oxide heteroepitaxy exhibits excellent piezoresistive properties and mechanical flexibility. In the near future, the importance of flex sensors will emerge because of the precise control in the automation industries, and our results lead to a new design in the field of flex sensors.
URI: http://dx.doi.org/10.1021/acsami.0c02275
http://hdl.handle.net/11536/154567
ISSN: 1944-8244
DOI: 10.1021/acsami.0c02275
Journal: ACS APPLIED MATERIALS & INTERFACES
Volume: 12
Issue: 19
Begin Page: 21818
End Page: 21826
Appears in Collections:Articles