Atomic-Scale Localized Thinning and Reconstruction of Two-Dimensional WS2 Layers through In Situ Transmission Electron Microscopy/Scanning Transmission Electron Microscopy

Abstract

Subnanometer nanofabrication has been investigated, and electron beam processing has been found to be a suitable strategy to control nanoparticle organization over large areas. Organized nanostructures have demonstrated their potential for technological applications. Here, we focus on the processing of tungsten disulfide (WS2) due to its novelty and promising electronic properties for further development of functional devices. First, we summarize the theory of electron beam irradiation by surveying the dynamic behaviors observed during in situ experiments. In particular, the diverse structures with various numbers of layers derived from localized thinning produce considerable lateral heterointerfaces. The generation of the intriguing tungsten-rich cluster is also consistent with the mechanism of our atomic engineering experiments. These findings suggest a method for the electron beam processing of 2D materials and demonstrate the viability of atomic engineering using electron irradiation.