標題: A gasket-type standard leak element using femtosecond laser micromachining
作者: Chan, C. K.
Tu, C. Y.
Yeh, S. D.
Chang, C. C.
Lin, T. C.
Luo, C. W.
Hwang, C. S.
電子物理學系
Department of Electrophysics
關鍵字: Leak element;Femtosecond laser ablation;Molecular flow conductance;Microfluidic
公開日期: 1-Oct-2020
摘要: A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (<1 x 10(-6) L s(-1)) of the micmfluidic channel for various non-condensable gases - H-2, He, CH4, N-2 and CO2 were determined by a measuring system based on conductance modulation (CM) method. The experimental results show that the flow characteristics of our devices exhibit molecular flow at a pressure up to 100 mbar and the conductance values of H-2, He, CH4, N-2 and CO2 are inversely proportional to the square root of their molecular mass.
URI: http://dx.doi.org/10.1016/j.vacuum.2020.109650
http://hdl.handle.net/11536/155350
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2020.109650
期刊: VACUUM
Volume: 180
起始頁: 0
結束頁: 0
Appears in Collections:Articles