Micromachining program status at the SRRC

Title:	Micromachining program status at the SRRC
Authors:	Cheng, Y Shew, BY Shih, WP Wang, SS Lin, CY Yang, WK Lu, M Lee, WH 交大名義發表 National Chiao Tung University
Issue Date:	1-Dec-1997
Abstract:	This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.
URI:	http://hdl.handle.net/11536/160
ISSN:	0946-7076
Journal:	MICROSYSTEM TECHNOLOGIES
Volume:	4
Issue:	1
Begin Page:	12
End Page:	16
Appears in Collections:	Conferences Paper

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APA	Cheng, Y., Shew, B., Shih, W., Wang, S., Lin, C., Yang, W., Lu, M., & Lee, W. (1997). Micromachining program status at the SRRC. WOS:000071130700004.
Bibtex	@article{Cheng1997Micromachining, title={Micromachining program status at the SRRC}, author={Cheng, Y and Shew, BY and Shih, WP and Wang, SS and Lin, CY and Yang, WK and Lu, M and Lee, WH}, journal={WOS:000071130700004}, year={1997}, url={https://ir.lib.nycu.edu.tw/handle/11536/160}, }