標題: | Physical Analysis of a Biomimetic Microphone With a Central-Supported (C-S) Circular Diaphragm for Sound Source Localization |
作者: | Chen, Chien-Chang Cheng, Yu-Ting 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Biomimetic microphone;central floating joint;central-supported diaphragm;clover;hybrid;MEMS microphone;parasitoid fly;quality factor;sound source localization;squeeze film air damping effect |
公開日期: | 1-五月-2012 |
摘要: | This paper presents a physical analysis of the biomimetic microphone designed with a central-supported (C-S) diaphragm for the sound source localization. A clover-stem-like C-S design is proposed and achieving 47% improvement of net diaphragm displacement in comparison with the conventional C-S diaphragm design. The new design can effectively not only compensate undesired deformation of sensing diaphragm due to gravity and residual stresses but also make the diaphragm more flexible for better sound pressure sensitivity. |
URI: | http://hdl.handle.net/11536/16007 |
ISSN: | 1530-437X |
期刊: | IEEE SENSORS JOURNAL |
Volume: | 12 |
Issue: | 5 |
結束頁: | 1504 |
顯示於類別: | 期刊論文 |