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dc.contributor.authorYang, Wei-Jenen_US
dc.contributor.authorTsao, Chung-Chenen_US
dc.contributor.authorHsu, Chun-Yoaen_US
dc.contributor.authorChang, Hung-Chihen_US
dc.contributor.authorChou, Chang-Pingen_US
dc.contributor.authorKao, Jin-Yihen_US
dc.date.accessioned2014-12-08T15:23:56Z-
dc.date.available2014-12-08T15:23:56Z-
dc.date.issued2012-07-01en_US
dc.identifier.issn0002-7820en_US
dc.identifier.urihttp://hdl.handle.net/11536/16656-
dc.description.abstract"This article deals with the optimization of the process parameters, with regard to multiple performance characteristics, involved in the preparation of transparent conducting Al2O3-doped (2 wt.%) zinc oxide (AZO) thin films deposited onto flexible polyethylene terephthalate (PET) substrates, using radio frequency (RF) magnetron sputtering. Experiments based on the Grey-Taguchi method were conducted to examine the influence of deposition parameters (RF power, sputtering pressure, substrate-to-target distance, and coating time) on the deposition rate, electrical resistivity and structural, morphological and optical transmittance. Experimental results indicate that using the optimal parameter set selected by Grey theory prediction, it is possible to achieve an improvement of 3.8% in deposition rate, of 45.6% in resistivity, and to maintain the transmittance over 80%, compared to that achieved by using the Taguchi method. For the Grey theory prediction, films were deposited using substrate-to-target distance of 80, 85, and 90 mm, while maintaining constant values for the other conditions. A clear decrease in resistivity was observed, as substrate-to-target distance decreased, with the lowest resistivity being obtained at 80 mm, although a better optical transmittance was achieved at a distance of 85 mm. It is evident that the resistivity decreases as the Al buffer thickness increases, with the lowest resistivity 7.0 x 10-4 O-cm, being found for a 15 nm thickness of Al buffer. The transmittance decreases, as the Al buffer thickness increases; transmittance values of 84.5%, 81.8%, and 79.4% correspond to an Al buffer thickness of 5, 10, and 15 nm, respectively. From the results of pull-off testing, the adhesive strength of the AZO film on a PET substrate increases, as the buffer thickness is increased."en_US
dc.language.isoen_USen_US
dc.titleFabrication and Characterization of Transparent Conductive ZnO:Al Thin Films Deposited on Polyethylene Terephthalate Substratesen_US
dc.typeArticleen_US
dc.identifier.journalJOURNAL OF THE AMERICAN CERAMIC SOCIETYen_US
dc.citation.volume95en_US
dc.citation.issue7en_US
dc.citation.epage2140en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000306080900016-
dc.citation.woscount5-
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