標題: A non-selenization technology by co-sputtering deposition for solar cell applications
作者: Jheng, Bao-Tang
Liu, Po-Tsun
Wu, Meng-Chyi
Shieh, Han-Ping D.
光電工程學系
顯示科技研究所
Department of Photonics
Institute of Display
公開日期: 1-Jan-1970
摘要: "This work presents a novel method to form polycrystalline Cu(In1-xGax)Se-2 (CIGS) thin film by co-sputtering of In-Se and Cu-Ga alloy targets without an additional selenization process. An attempt was also made to thoroughly elucidate the surface morphology, crystalline phases, physical properties, and chemical properties of the CIGS films by using material analysis methods. Experimental results indicate that CIGS thin films featured densely packed grains and chalcopyrite phase peaks of (112), (220), (204), (312), and (116). Raman spectroscopy analysis revealed chalcopyrite CIGS phase with Raman shift at 175 cm(-1), while no signal at 258 cm(-1) indicated the exclusion of Cu2-xSe phase. Hall effect measurements confirmed the polycrystalline Cu(In, Ga)Se-2 thin film to be of p type semiconductor with a film resistivity and mobility of 2.19 x 102 Omega cm and 88 cm(2)/V s, respectively. (C) 2012 Optical Society of America"
URI: http://hdl.handle.net/11536/16658
ISSN: 0146-9592
期刊: OPTICS LETTERS
Volume: 37
Issue: 13
結束頁: 2760
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