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dc.contributor.authorSHIE, JSen_US
dc.contributor.authorCHOU, BCSen_US
dc.contributor.authorCHEN, YMen_US
dc.date.accessioned2014-12-08T15:03:06Z-
dc.date.available2014-12-08T15:03:06Z-
dc.date.issued1995-11-01en_US
dc.identifier.issn0734-2101en_US
dc.identifier.urihttp://dx.doi.org/10.1116/1.579623en_US
dc.identifier.urihttp://hdl.handle.net/11536/1680-
dc.description.abstractAs an extension of previous work in our laboratory, a wide-range Pirani gauge that is capable of measuring vacuum pressure down to 10(-7) Torr reproducibly has been built, The micromachined Pirani sensor used in the experiments has a suspended membrane that is supported by the nearly radiation-limited, thermally insulating beam leads crossing over a V-groove cavity. A method of partial dummy compensation, as proposed previously by Weng and Shie for eliminating the ambient drift, is proved here to be very effective with a thermal drift as small as only 5.7 mu V/degrees C. It has also been found that a thermal-stress-induced piezoresistive effect, which has a profound influence on the limitation of measurement, appears in the constant-bias operation wherein the sensor temperature rises with the reduction of gas pressure and therefore thermal conduction. This effect causes the irreproducibility of pressure measurements by the device below 10(-5) Torr. In addition to its inherently higher sensitivity, a constant-temperature circuit together with a thermoelectric stabilization of the sensor substrate temperature can eliminate the induced piezoresistive error. The constant-temperature circuit operating on the micro-Pirani sensor together with the above-mentioned temperature compensation and the stabilization methods have extended gauge capability down to 10(-7) Torr, which is only limited by the signal readout resolution (similar to 1 mu V). This is three orders of magnitude more sensitive than the conventional vacuum gauges of the thermal conductivity type. (C) 1995 American Vacuum Societyen_US
dc.language.isoen_USen_US
dc.titleHIGH-PERFORMANCE PIRANI VACUUM GAUGEen_US
dc.typeArticleen_US
dc.identifier.doi10.1116/1.579623en_US
dc.identifier.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMSen_US
dc.citation.volume13en_US
dc.citation.issue6en_US
dc.citation.spage2972en_US
dc.citation.epage2979en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:A1995TF11100052-
dc.citation.woscount43-
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