完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | SHIE, JS | en_US |
dc.contributor.author | CHOU, BCS | en_US |
dc.contributor.author | CHEN, YM | en_US |
dc.date.accessioned | 2014-12-08T15:03:06Z | - |
dc.date.available | 2014-12-08T15:03:06Z | - |
dc.date.issued | 1995-11-01 | en_US |
dc.identifier.issn | 0734-2101 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1116/1.579623 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/1680 | - |
dc.description.abstract | As an extension of previous work in our laboratory, a wide-range Pirani gauge that is capable of measuring vacuum pressure down to 10(-7) Torr reproducibly has been built, The micromachined Pirani sensor used in the experiments has a suspended membrane that is supported by the nearly radiation-limited, thermally insulating beam leads crossing over a V-groove cavity. A method of partial dummy compensation, as proposed previously by Weng and Shie for eliminating the ambient drift, is proved here to be very effective with a thermal drift as small as only 5.7 mu V/degrees C. It has also been found that a thermal-stress-induced piezoresistive effect, which has a profound influence on the limitation of measurement, appears in the constant-bias operation wherein the sensor temperature rises with the reduction of gas pressure and therefore thermal conduction. This effect causes the irreproducibility of pressure measurements by the device below 10(-5) Torr. In addition to its inherently higher sensitivity, a constant-temperature circuit together with a thermoelectric stabilization of the sensor substrate temperature can eliminate the induced piezoresistive error. The constant-temperature circuit operating on the micro-Pirani sensor together with the above-mentioned temperature compensation and the stabilization methods have extended gauge capability down to 10(-7) Torr, which is only limited by the signal readout resolution (similar to 1 mu V). This is three orders of magnitude more sensitive than the conventional vacuum gauges of the thermal conductivity type. (C) 1995 American Vacuum Society | en_US |
dc.language.iso | en_US | en_US |
dc.title | HIGH-PERFORMANCE PIRANI VACUUM GAUGE | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1116/1.579623 | en_US |
dc.identifier.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | en_US |
dc.citation.volume | 13 | en_US |
dc.citation.issue | 6 | en_US |
dc.citation.spage | 2972 | en_US |
dc.citation.epage | 2979 | en_US |
dc.contributor.department | 交大名義發表 | zh_TW |
dc.contributor.department | 光電工程學系 | zh_TW |
dc.contributor.department | National Chiao Tung University | en_US |
dc.contributor.department | Department of Photonics | en_US |
dc.identifier.wosnumber | WOS:A1995TF11100052 | - |
dc.citation.woscount | 43 | - |
顯示於類別: | 期刊論文 |